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Related Experiment Video

Updated: May 12, 2026

Demonstration of Equal-Intensity Beam Generation by Dielectric Metasurfaces
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High-Efficiency Near-Infrared Beam Steering Enabled by a CMOS-Driven Liquid-Crystal Metasurface.

Chengkun Dong1,2,3, Jiayi Wang2, Bo Huang2

  • 1School of Integrated Circuits, Jiangnan University, Wuxi 214401, China.

Nano Letters
|May 11, 2026
PubMed
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This summary is machine-generated.

We developed a compact, CMOS-driven liquid-crystal metasurface for dynamic beam steering in the near-infrared spectrum. This device enables efficient, electrically controlled light manipulation for advanced optical applications.

Area of Science:

  • Photonics and optical engineering.
  • Nanotechnology and materials science.
  • Electrical engineering and device integration.

Background:

  • Dynamic control of light, especially beam steering, is crucial for optical communications, LiDAR, and imaging.
  • Optical metasurfaces offer a pathway to ultrathin wavefront engineering using subwavelength nanostructures.

Purpose of the Study:

  • To demonstrate a compact near-infrared beam-steering device.
  • To leverage CMOS-driven liquid-crystal metasurfaces for efficient light manipulation.

Main Methods:

  • Utilized silicon nanoantennas with Mie resonances and Fabry-Perot cavities for phase modulation.
  • Integrated a CMOS backplane with 2500 independently addressable 1D electrodes for precise control.
  • Achieved a pixel pitch of 0.8 μm for ultracompact device design.
Keywords:
beam steeringliquid crystalmetasurfacenear-infrared photonicsspatial light modulator

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Last Updated: May 12, 2026

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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
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Main Results:

  • Demonstrated continuous phase modulation approaching 2π.
  • Achieved electrically controlled 1D beam steering with a field of view up to 24°.
  • Reported diffraction efficiency of ~40% at small angles, >18% at maximum deflection.

Conclusions:

  • The developed device offers a scalable, CMOS-compatible architecture for near-infrared photonics.
  • This technology presents a promising route toward next-generation spatial light modulators.
  • The device enables efficient and dynamic control of light beams for various advanced applications.