Development of integrated diffractive optical elements for an optimized adjustable array-focus beam application

In this research, a comprehensive method by which to create array-focus beams using diffractive optical elements is presented. The main purpose of the paper is to shape a Gaussian laser beam into specific array beams with controllable parameters while keeping costs low and requiring minimal equipment. This is achieved by using a single diffractive optical element for each pattern. By applying integrated structure techniques and Fourier optics, diffractive optical elements are designed and simulated prior to fabrication using the laser lithography method. A verification setup was devised to evaluate the optical performance of the diffractive optical element. The outcomes of the research demonstrate the effectiveness of diffractive optical elements in independently forming array-focus patterns for various types of beams, such as Gaussian beams, high-order twisted vortex beams, and circular beams, with minimal expense, a compact size, and good durability. The applications of these patterns extend across various fields, including glass cutting, modified Hartmann mask design, and surface scanning. These patterns are particularly beneficial in non-light wavelength scenarios, such as X-rays, gamma rays, and ultraviolet light, where traditional lenses are challenging to manufacture due to material limitations.