Study on Vibration and Acoustic Protection of Indium EUV Filters for Space Payloads

Shilei Mao1,2, Bo Chen1, Quanfeng Guo1

  • 1Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.

Micromachines
|June 26, 2026
PubMed
Abstract