Non-Destructive 3D Elemental Characterization of Multilayer Materials by ANN-Assisted Ion Beam Analysis

Victoria Corregidor1,2, Nuno P Barradas1,2, Rui C da Silva1,3

  • 1Departamento de Engenharia e Ciências Nucleares, Instituto Superior Técnico, Universidade de Lisboa, 2695-066 Bobadela, Portugal.

Summary

This study introduces a new AI framework for non-destructive 3D elemental mapping in complex materials. It reveals subsurface structures in advanced devices, overcoming limitations of surface-sensitive techniques.

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