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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
An integrated monolithic photonic accelerometer with on-chip fringe-counting
Yuqi Meng1, Qiyun Hu2, Ehsan Vatankhah2
1Chandra Family Department of Electrical and Computer Engineering, University of Texas at Austin, Austin, TX, USA. yuqimeng@utexas.edu.
Microsystems & Nanoengineering
|July 23, 2026
Summary
We developed a novel integrated photonic accelerometer using phase-unwrapping for enhanced dynamic range. This chip-scale sensor achieves high sensitivity, paving the way for advanced inertial sensing applications.
Area of Science:
- Photonics
- Integrated Circuits
- Inertial Sensing
Background:
- Photonic integrated circuits (PICs) offer potential for precision inertial sensing.
- Existing photonic accelerometers face limitations in readout complexity, dynamic range, and validation.
- Integrated photonics remains an underexplored platform for high-performance accelerometers.
Purpose of the Study:
- To design, model, and experimentally characterize a novel integrated photonic accelerometer.
- To enhance the dynamic range of photonic accelerometers using phase-unwrapping techniques.
- To establish PICs as a viable platform for high-dynamic-range inertial sensors.
Main Methods:
- Monolithic integration of two Mach-Zehnder interferometers on a silicon-nitride chip.
- Implementation of an open-loop fringe-counting strategy with a quarter-wavelength inter-arm path-length offset.
- Utilizing ellipse-fitting-based phase-unwrapping for accurate phase recovery over an expanded measurement range.
Main Results:
- Achieved a measured noise floor of 2.0 µg/√Hz, with a pathway to ~10 ng/√Hz.
- Demonstrated a 39 dB improvement in dynamic range via phase-unwrapping compared to conventional interferometers.
- First demonstration of fringe-counting functionality on a monolithic PIC accelerometer chip.
Conclusions:
- Integrated photonics is a promising platform for high-dynamic-range inertial sensing.
- The developed chip-scale accelerometer design surpasses limitations of current technologies.
- This work establishes a new route for miniaturized, high-performance inertial sensors.
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