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Fine-tuning the Size and Minimizing the Noise of Solid-state Nanopores
Published on: October 31, 2013
Research progress and application of solid-state nanopore fabrication based on wet etching
Liang Cheng1,2, Yun Chen1,2, Bin Xie1,2
1State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou 510006, China.
Fundamental Research
|August 1, 2026
Summary
Solid-state nanopores offer revolutionary biomedical detection. Wet etching provides a cost-effective method for fabricating these nanopores, enabling advancements in gene sequencing and protein analysis.
Area of Science:
- Nanotechnology
- Materials Science
- Biomedical Engineering
Background:
- Solid-state nanopores are crucial for molecular detection, offering mechanical strength and tunable structures.
- Wet etching is a cost-effective, efficient, and scalable fabrication method for solid-state nanopores.
- Existing methods provide compatibility with diverse substrate materials like silicon and metals.
Purpose of the Study:
- To systematically review advancements in solid-state nanopore fabrication using wet etching techniques.
- To detail the applications of solid-state nanopores in various fields.
- To provide a prospective analysis for improving nanopore size consistency and exploring future applications.
Main Methods:
- Review of anisotropic wet etching.
- Review of metal-assisted chemical etching.
- Review of electrochemical etching.
Main Results:
- Wet etching offers low cost, high efficiency, and batch production for solid-state nanopores.
- Key wet etching technologies include anisotropic, metal-assisted chemical, and electrochemical etching.
- Solid-state nanopores fabricated by wet etching have diverse applications, including gene sequencing, protein detection, energy, desalination, and haemodialysis.
Conclusions:
- Wet etching is a promising technique for fabricating solid-state nanopores.
- Further research can enhance size consistency and expand applications.
- Advancements in fabrication technology will drive innovation in molecular detection and beyond.
