Electropulse-Driven Dislocation Evolution in Sub-10 nm Metallic Nanocrystals

Youran Hong1, Xiaoyu Zhai1, Xing Li1

  • 1Center of Electron Microscopy, State Key Laboratory of Silicon and Advanced Semiconductor Materials, School of Materials Science and Engineering, Zhejiang University, Hangzhou, People's Republic of China.

Summary

Understanding dislocation dynamics in sub-10 nm components is key for nanodevice reliability. Extreme current densities cause electron-lattice interactions, leading to defect formation and structural disordering in metallic nano-interconnects.