Developing the NewAthena X-IFU Cryogenic AntiCoincidence Detector (CryoAC): From Microfabrication Process...

The Cryogenic Anticoincidence (CryoAC) detector is a critical subsystem designed to reduce the particle background for the X-ray Integral Field Unit (X-IFU) instrument onboard the NewAthena space observatory, the next ESA X-ray Large mission. Advancing this technology to Technology Readiness Level 5 (TRL5) requires a unified validation spanning both cleanroom microfabrication repeatability and mK low temperature operational performance. This work presents the complete development cycle of the Demonstration Model 1.2 (DM 1.2), which is aimed at completing the TRL5 demonstration path featured by all the critical technologies operating simultaneously. First, single-process verification protocols were established for Iridium pulsed laser deposition, Reactive Ion Etching (RIE), and deep silicon trenching via the Bosch process. Second, three identical single-pixel prototypes were fabricated and subjected to mK characterization. Four-wire resistance measurement results confirmed a 2/3 production yield against strict design targets (T_C ~100 mK). Finally, functional testing at a bath temperature of 50 mK using a VTT FAB4 SQUID readout demonstrated excellent performance, including a low-energy threshold of ~0.6 keV, a pixel power dissipation of 5.15 nW, and an energy resolution ΔE_FWHM = 735 eV at 6 keV. These combined achievements successfully validate the entire manufacturing and operational baseline against all primary space mission requirements. This paper has to be considered as a review of the CryoAC technology path toward the TRL5 achievement; main findings will be reported and discussed. Details are relegated to other papers.