Residue-enhanced symmetrical decoupling iteration for robust high-precision tilt phase-shifting interferometry

Area of Science:

• Optical Metrology
• Interferometry
• Signal Processing

Background:

• Generalized phase-shifting interferometry is vital for precision measurements.
• Vibration-induced tilt errors and optimization instabilities limit current methods.
• Existing iterative solvers struggle with non-smooth convergence and outlier sensitivity.

Purpose of the Study:

• To introduce a novel algorithm, residue-enhanced symmetrical decoupling iteration (RSEDI), for robust phase reconstruction.
• To overcome limitations of existing iterative solvers in phase-shifting interferometry.
• To enhance accuracy and stability in vibration-prone metrology environments.

Main Methods:

• Developed the residue-enhanced symmetrical decoupling iteration (RSEDI) algorithm.
• Implemented a residue-adaptive weighting mechanism to mitigate systematic artifacts.
• Incorporated a dynamic smoothing strategy and symmetrical piston correction for temporal continuity.

Main Results:

• RSEDI demonstrates robust and high-fidelity phase reconstruction.
• The algorithm effectively suppresses systematic artifacts and stabilizes the optimization path.
• Achieved superior performance compared to state-of-the-art methods in simulations and experiments.

Conclusions:

• RSEDI significantly improves phase reconstruction accuracy and stability in challenging environments.
• The proposed method offers a robust solution for precision metrology under vibration.
• RSEDI prevents phase wrapping failures, especially in low signal-to-noise conditions.