Influence of Modifying Additives on Resin-Bonded Diamond Tool and Single-Crystal Silicon Lapping Performance

To improve the interfacial tribological conditions, debris evacuation, and surface integrity in single-crystal silicon lapping using resin-bonded diamond tools, a multifunctional resin-bonded diamond tool incorporating lubricating, surface-quality-regulating, and pore-forming additives was developed. Single-factor experiments were conducted to evaluate the effects of graphite, MoS₂, and Polytetrafluoroethylene (PTFE); CeO₂, SiO₂, and ZrO₂; and NH₄HCO₃, NaHCO₃, and NaCl on tool performance and silicon-surface quality. PTFE exhibited the best overall lubrication performance, reducing the temperature rise by 18.0% compared with the control. The addition of 1 wt.% CeO₂ reduced the surface roughness Sa from 11.72 to 9.47 nm and decreased the residual compressive stress by approximately 86.5%. Moreover, 10 wt.% NH₄HCO₃ increased the apparent porosity from 6.76% to 32.42% and improved the sustainability of material removal. Based on the single-factor results, an L₉ orthogonal experiment was performed using PTFE, CeO₂, and NH₄HCO₃ as the control factors. Multi-response optimization identified a balanced formulation containing 1.5 wt.% PTFE, 1.0 wt.% CeO₂, and 10 wt.% NH₄HCO₃. Validation experiments yielded a Sa of 8.46 nm, MRR = 58.85 nm/min, a material removal-to-tool wear ratio (W-ratio) of 7.67, and a residual stress of -55.20 MPa, demonstrating a favorable balance among surface quality, material-removal efficiency, and tool durability.