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Applied Optics
|
September 22, 2010
Reflection mask defect repair
A M Hawryluk, D Stewart
Journal of X-Ray Science and Technology
|
February 11, 2011
Wafer cost analysis for a soft x-ray projection lithography system
N M Ceglio, A M Hawryluk
Journal of X-Ray Science and Technology
|
February 11, 2011
Power loading limitations in soft x-ray projection lithography
A M Hawryluk, N M Ceglio
Applied Optics
|
September 22, 2010
Wavelength considerations in soft-x-ray projection lithography
A M Hawryluk, N M Ceglio
Applied Optics
|
April 17, 2010
Imaging x-ray spectrometer for laser fusion applications
N M Ceglio, A M Hawryluk, R H Price
Applied Optics
|
September 22, 2010
Front-end design issues in soft-x-ray projection lithography
N M Ceglio, A M Hawryluk, G E Sommargren
Applied Optics
|
January 15, 1983
Time-resolved x-ray transmission grating spectrometer for studying laser-produced plasmas
N M Ceglio, R L Kauffman, A M Hawryluk, et al.
Optics Letters
|
August 29, 2009
Deep-ultraviolet spatial-period division using an excimer laser
A M Hawryluk, H I Smith, R M Osgood, et al.
Optics Letters
|
September 12, 2009
Demonstration of guided-wave phenomena at extreme-ultraviolet and soft-x-ray wavelengths
N M Ceglio, A M Hawryluk, D G Stearns, et al.
Optics Letters
|
September 11, 2009
Multipass amplification of soft x-rays in a laser cavity
N M Ceglio, D G Stearns, D F Gaines, et al.
Page
of 1
Search research articles
Search
Showing results (1-10 of 10) with videos related to
Sort By:
Page
of 1
Applied Optics
|
September 22, 2010
Reflection mask defect repair
A M Hawryluk, D Stewart
Journal of X-Ray Science and Technology
|
February 11, 2011
Wafer cost analysis for a soft x-ray projection lithography system
N M Ceglio, A M Hawryluk
Journal of X-Ray Science and Technology
|
February 11, 2011
Power loading limitations in soft x-ray projection lithography
A M Hawryluk, N M Ceglio
Applied Optics
|
September 22, 2010
Wavelength considerations in soft-x-ray projection lithography
A M Hawryluk, N M Ceglio
Applied Optics
|
April 17, 2010
Imaging x-ray spectrometer for laser fusion applications
N M Ceglio, A M Hawryluk, R H Price
Applied Optics
|
September 22, 2010
Front-end design issues in soft-x-ray projection lithography
N M Ceglio, A M Hawryluk, G E Sommargren
Applied Optics
|
January 15, 1983
Time-resolved x-ray transmission grating spectrometer for studying laser-produced plasmas
N M Ceglio, R L Kauffman, A M Hawryluk, et al.
Optics Letters
|
August 29, 2009
Deep-ultraviolet spatial-period division using an excimer laser
A M Hawryluk, H I Smith, R M Osgood, et al.
Optics Letters
|
September 12, 2009
Demonstration of guided-wave phenomena at extreme-ultraviolet and soft-x-ray wavelengths
N M Ceglio, A M Hawryluk, D G Stearns, et al.
Optics Letters
|
September 11, 2009
Multipass amplification of soft x-rays in a laser cavity
N M Ceglio, D G Stearns, D F Gaines, et al.
Page
of 1