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Journal of Micro/Nanolithography, MEMS, and MOEMS : JM3|October 9, 2020
Methodology for evaluating the information distribution in small angle scattering from periodic nanostructuresDaniel F Sunday, R Joseph KlineJournal of Micro/Nanolithography, MEMS, and MOEMS : JM3|August 24, 2016
Advancing X-ray scattering metrology using inverse genetic algorithmsAdam F Hannon, Daniel F Sunday, Donald Windover, et al.Journal of Applied Crystallography|April 29, 2024
Modeling the polarized X-ray scattering from periodic nanostructures with molecular anisotropyChristopher D Liman, Thomas A Germer, Daniel F Sunday, et al.ACS Nano|May 20, 2021
Buried Structure in Block Copolymer Films Revealed by Soft X-ray ReflectivityDaniel F Sunday, Jacob L Thelen, Chun Zhou, et al.Journal of Applied Crystallography|October 9, 2020
X-ray characterization of contact holes for block copolymer lithographyDaniel F Sunday, Florian Delachat, Ahmed Gharbi, et al.ACS Applied Materials & Interfaces|May 26, 2017
Characterizing Patterned Block Copolymer Thin Films with Soft X-raysDaniel F Sunday, Jiaxing Ren, Christopher D Liman, et al.ACS Macro Letters|June 2, 2022
Quantifying the Interface Energy of Block Copolymer Top CoatsDaniel F Sunday, Michael J Maher, Summer Tein, et al.ACS Nano|November 23, 2020
Confinement and Processing Can Alter the Morphology and Periodicity of Bottlebrush Block Copolymers in Thin FilmsDaniel F Sunday, Moshe Dolejsi, Alice B Chang, et al.Molecular Systems Design & Engineering|June 13, 2018
Optimizing self-consistent field theory block copolymer models with X-ray metrologyAdam F Hannon, Daniel F Sunday, Alec Bowen, et al.ACS Nano|July 31, 2014
Determination of the internal morphology of nanostructures patterned by directed self assemblyDaniel F Sunday, Matthew R Hammond, Chengqing Wang, et al.Pageof 6