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Optics Express|November 29, 2023
Fast inverse lithography approach based on a model-driven graph convolutional networkShengen Zhang, Xu Ma, Junbi Zhang
Applied Optics|August 12, 2025
Fast lithographic thick-mask model using overlapped patch matchingSheng Liu, Xu Ma
Journal of the Optical Society of America. A, Optics, Image Science, and Vision|November 28, 2008
Binary mask optimization for inverse lithography with partially coherent illuminationXu Ma, Gonzalo Arce
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