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Applied Optics
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May 3, 2019
Scan angle error measurement based on phase-stepping algorithms in scanning beam interference lithography
Minkang Li, Xiansong Xiang, Changhe Zhou, et al.
Applied Optics
|
August 18, 2018
Precision fringe period metrology using an LSQ sine fit algorithm
Xiansong Xiang, Minkang Li, Chunlong Wei, et al.
Applied Optics
|
May 3, 2019
Long-range in situ picometer measurement of the period of an interference field
Xiansong Xiang, Wei Jia, Changcheng Xiang, et al.
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of 1
Search research articles
Search
Showing results (1-10 of 3) with videos related to
Sort By:
Page
of 1
Applied Optics
|
May 3, 2019
Scan angle error measurement based on phase-stepping algorithms in scanning beam interference lithography
Minkang Li, Xiansong Xiang, Changhe Zhou, et al.
Applied Optics
|
August 18, 2018
Precision fringe period metrology using an LSQ sine fit algorithm
Xiansong Xiang, Minkang Li, Chunlong Wei, et al.
Applied Optics
|
May 3, 2019
Long-range in situ picometer measurement of the period of an interference field
Xiansong Xiang, Wei Jia, Changcheng Xiang, et al.
Page
of 1