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Applied Optics|September 22, 2010
Radiation hardness of molybdenum silicon multilayers designed for use in a soft-x-ray projection lithography systemD P Gaines, R C Spitzer, N M Ceglio, et al.Applied Optics|June 12, 2010
Time-resolved measurement of double-pass amplification of soft x raysN M Ceglio, D P Gaines, J E Trebes, et al.Optics Letters|August 29, 2009
Deep-ultraviolet spatial-period division using an excimer laserA M Hawryluk, H I Smith, R M Osgood, et al.Pageof 2