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Optics Express
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March 5, 2024
Linearized EUV mask optimization based on the adjoint method
Pinxuan He, Jiamin Liu, Honggang Gu, et al.
Optics Express
|
September 15, 2023
EUV mask model based on modified Born series
Pinxuan He, Jiamin Liu, Honggang Gu, et al.
Optics Express
|
June 11, 2026
EUV mask modeling based on a wide-angle full-vector beam propagation method
Zhilong Zhong, Jiamin Liu, Pinxuan He, et al.
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of 1
Search research articles
Search
Showing results (1-10 of 3) with videos related to
Sort By:
Page
of 1
Optics Express
|
March 5, 2024
Linearized EUV mask optimization based on the adjoint method
Pinxuan He, Jiamin Liu, Honggang Gu, et al.
Optics Express
|
September 15, 2023
EUV mask model based on modified Born series
Pinxuan He, Jiamin Liu, Honggang Gu, et al.
Optics Express
|
June 11, 2026
EUV mask modeling based on a wide-angle full-vector beam propagation method
Zhilong Zhong, Jiamin Liu, Pinxuan He, et al.
Page
of 1