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Journal of Research of the National Institute of Standards and Technology
|
December 8, 2021
Apparatus for Characterizing Gas-Phase Chemical Precursor Delivery for Thin Film Deposition Processes
James E Maslar, William A Kimes, Brent A Sperling
Applied Spectroscopy
|
March 28, 2012
Quantum cascade laser-based measurement of metal alkylamide density during atomic layer deposition
James E Maslar, William A Kimes, Brent A Sperling
Applied Spectroscopy
|
February 10, 2015
Measurements of metal alkylamide density during atomic layer deposition using a mid-infrared light-emitting diode (LED) source
James E Maslar, John Hoang, William A Kimes, et al.
Applied Spectroscopy
|
September 27, 2013
Time-resolved surface infrared spectroscopy during atomic layer deposition
Brent A Sperling, John Hoang, William A Kimes, et al.
Applied Spectroscopy
|
July 15, 2017
Nondispersive Infrared Gas Analyzer for Vapor Density Measurements of a Carbonyl-Containing Organometallic Cobalt Precursor
James E Maslar, William A Kimes, Brent A Sperling, et al.
Applied Spectroscopy
|
October 17, 2019
Nondispersive Infrared Gas Analyzer for Partial Pressure Measurements of a Tantalum Alkylamide During Vapor Deposition Processes
James E Maslar, William A Kimes, Brent A Sperling, et al.
Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films : an Official Journal of the American Vacuum Society
|
July 10, 2024
Characterization of bubbler performance for low-volatility liquid precursor delivery
James E Maslar, William A Kimes, Brent A Sperling, et al.
Optics Letters
|
May 5, 2009
Characterization of metal oxide nanofilm morphologies and composition by terahertz transmission spectroscopy
Edwin J Heilweil, James E Maslar, William A Kimes, et al.
Chemistry of Materials : a Publication of the American Chemical Society
|
March 17, 2018
Rapid Wafer-Scale Growth of Polycrystalline 2H-MoS<sub>2</sub> by Pulsed Metalorganic Chemical Vapor Deposition
Berc Kalanyan, William A Kimes, Ryan Beams, et al.
Page
of 1
Search research articles
Search
Showing results (1-10 of 9) with videos related to
Sort By:
Page
of 1
Journal of Research of the National Institute of Standards and Technology
|
December 8, 2021
Apparatus for Characterizing Gas-Phase Chemical Precursor Delivery for Thin Film Deposition Processes
James E Maslar, William A Kimes, Brent A Sperling
Applied Spectroscopy
|
March 28, 2012
Quantum cascade laser-based measurement of metal alkylamide density during atomic layer deposition
James E Maslar, William A Kimes, Brent A Sperling
Applied Spectroscopy
|
February 10, 2015
Measurements of metal alkylamide density during atomic layer deposition using a mid-infrared light-emitting diode (LED) source
James E Maslar, John Hoang, William A Kimes, et al.
Applied Spectroscopy
|
September 27, 2013
Time-resolved surface infrared spectroscopy during atomic layer deposition
Brent A Sperling, John Hoang, William A Kimes, et al.
Applied Spectroscopy
|
July 15, 2017
Nondispersive Infrared Gas Analyzer for Vapor Density Measurements of a Carbonyl-Containing Organometallic Cobalt Precursor
James E Maslar, William A Kimes, Brent A Sperling, et al.
Applied Spectroscopy
|
October 17, 2019
Nondispersive Infrared Gas Analyzer for Partial Pressure Measurements of a Tantalum Alkylamide During Vapor Deposition Processes
James E Maslar, William A Kimes, Brent A Sperling, et al.
Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films : an Official Journal of the American Vacuum Society
|
July 10, 2024
Characterization of bubbler performance for low-volatility liquid precursor delivery
James E Maslar, William A Kimes, Brent A Sperling, et al.
Optics Letters
|
May 5, 2009
Characterization of metal oxide nanofilm morphologies and composition by terahertz transmission spectroscopy
Edwin J Heilweil, James E Maslar, William A Kimes, et al.
Chemistry of Materials : a Publication of the American Chemical Society
|
March 17, 2018
Rapid Wafer-Scale Growth of Polycrystalline 2H-MoS<sub>2</sub> by Pulsed Metalorganic Chemical Vapor Deposition
Berc Kalanyan, William A Kimes, Ryan Beams, et al.
Page
of 1