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Applied Optics
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April 17, 2012
Kernel-based parametric analytical model of source intensity distributions in lithographic tools
Shiyuan Liu, Wei Liu, Xinjiang Zhou, et al.
Optics Letters
|
July 2, 2013
Convolution-variation separation method for efficient modeling of optical lithography
Shiyuan Liu, Xinjiang Zhou, Wen Lv, et al.
Journal of the Optical Society of America. A, Optics, Image Science, and Vision
|
January 22, 2015
Efficient representation of mask transmittance functions for vectorial lithography simulations
Xinjiang Zhou, Chuanwei Zhang, Hao Jiang, et al.
Environmental Research
|
May 10, 2026
Two-Step pyrolysis enabled by bentonite catalysis for the co-production of bioactive humic acid and functional carbon-clay composites
Huanhuan Li, Jiarun Duan, Lijuan Zhang, et al.
Page
of 1
Search research articles
Search
Showing results (1-10 of 4) with videos related to
Sort By:
Page
of 1
Applied Optics
|
April 17, 2012
Kernel-based parametric analytical model of source intensity distributions in lithographic tools
Shiyuan Liu, Wei Liu, Xinjiang Zhou, et al.
Optics Letters
|
July 2, 2013
Convolution-variation separation method for efficient modeling of optical lithography
Shiyuan Liu, Xinjiang Zhou, Wen Lv, et al.
Journal of the Optical Society of America. A, Optics, Image Science, and Vision
|
January 22, 2015
Efficient representation of mask transmittance functions for vectorial lithography simulations
Xinjiang Zhou, Chuanwei Zhang, Hao Jiang, et al.
Environmental Research
|
May 10, 2026
Two-Step pyrolysis enabled by bentonite catalysis for the co-production of bioactive humic acid and functional carbon-clay composites
Huanhuan Li, Jiarun Duan, Lijuan Zhang, et al.
Page
of 1