Yunsheng Deng
3PUBLICATIONS
2CO-AUTHORS
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Publications (3)
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|Jan 13, 2026
A 3D energy deposition model guided by resist activation energy for helium ion beam lithography at its resolution limits.Yunsheng Deng, Shiyang Gao, Jingfu Xu
|Aug 13, 2024
A strategy to fabricate nanostructures with sub-nanometer line edge roughness.Xin Zhuang, Yunsheng Deng, Yue Zhang
|Jul 01, 2021
Direct visualization of beam-resist interaction volume for sub-nanometer helium ion beam-lithography.Yunsheng Deng, Xin Zhuang, Wu Wang
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