Xin Zhuang
2PUBLICATIONS
2CO-AUTHORS

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Publications (2)
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|Jan 13, 2026
A 3D energy deposition model guided by resist activation energy for helium ion beam lithography at its resolution limits.Yunsheng Deng, Shiyang Gao, Jingfu Xu
|Aug 13, 2024
A strategy to fabricate nanostructures with sub-nanometer line edge roughness.Xin Zhuang, Yunsheng Deng, Yue Zhang
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