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Marcel Melzer

1PUBLICATIONS

3CO-AUTHORS

Microelectronics

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Publications (1)

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|Nov 21, 2020

2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride.

Katja Meinel, Marcel Melzer, Chris Stoeckel

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Frequent Collaborators

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Katja Meinel

1 joint publications

Chris Stoeckel

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Roman Forke

Frequent Collaborators

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Katja Meinel

1 joint publications

Chris Stoeckel

1 joint publications

Roman Forke

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