Katja Meinel
2PUBLICATIONS
4CO-AUTHORS
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Publications (2)
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|Apr 23, 2022
Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors.Chris Stoeckel, Katja Meinel, Marcel Melzer
|Nov 21, 2020
2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride.Katja Meinel, Marcel Melzer, Chris Stoeckel
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