Hideki Takagi
5PUBLICATIONS
5CO-AUTHORS
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Publications (5)
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|Jun 27, 2024
Ultra-High Vacuum Cells Realized by Miniature Ion Pump Using High-Efficiency Plasma Source.Yuichi Kurashima, Atsuhiko Maeda, Naoto Oshima
|Jan 21, 2023
High-Efficiency Plasma Source Using a Magnetic Mirror Trap for Miniature-Ion Pumps.Yuichi Kurashima, Taisei Motomura, Shinya Yanagimachi
|Nov 11, 2022
Wafer-Scale Room-Temperature Bonding of Smooth Au/Ti-Based Getter Layer for Vacuum Packaging.Takashi Matsumae, Shingo Kariya, Yuichi Kurashima
|Oct 27, 2022
An Ultra-Compact MEMS Pirani Sensor for In-Situ Pressure Distribution Monitoring.Lan Zhang, Jian Lu, Hideki Takagi
|Feb 21, 2019
Comparison of Argon and Oxygen Plasma Treatments for Ambient Room-Temperature Wafer-Scale Au⁻Au Bonding Using Ultrathin Au Films.Michitaka Yamamoto, Takashi Matsumae, Yuichi Kurashima
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