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Felix Mitschker

1PUBLICATIONS

6CO-AUTHORS

Pyrometallurgy

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|Apr 30, 2020

From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications.

Lukas Mai, Felix Mitschker, Claudia Bock

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Lukas Mai

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Claudia Bock

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Engin Ciftyurek

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Detlef Rogalla

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Klaus Schierbaum

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Anjana Devi

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Lukas Mai

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Claudia Bock

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Engin Ciftyurek

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Detlef Rogalla

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