Claudia Bock

7PUBLICATIONS
21CO-AUTHORS
Transition metal chemistryMetal organic frameworksPyrometallurgyCatalysis and mechanisms of reactionsCompound semiconductors
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Publications (7)

|Jul 26, 2026
Phase Engineering of Plasma-Enhanced Atomic Layer Deposited Molybdenum Disulfide Using High Accuracy Direct Writing With Focused Li+ and Ga+ Ion Beams and Ultrashort Pulse Laser.

|May 11, 2022
Water assisted atomic layer deposition of yttrium oxide using tris(N,N'-diisopropyl-2-dimethylamido-guanidinato) yttrium(iii): process development, film characterization and functional properties.

Lukas Mai, Nils Boysen, Ersoy Subaşı

|Apr 15, 2022
Atomic layer deposition of dielectric Y2O3 thin films from a homoleptic yttrium formamidinate precursor and water.

Nils Boysen, David Zanders, Thomas Berning

|Sep 28, 2021
A study on the influence of ligand variation on formamidinate complexes of yttrium: new precursors for atomic layer deposition of yttrium oxide.

Sebastian M J Beer, Nils Boysen, Arbresha Muriqi

|Apr 30, 2020
From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications.

Lukas Mai, Felix Mitschker, Claudia Bock

|Jul 25, 2019
PEALD of HfO2 Thin Films: Precursor Tuning and a New Near-Ambient-Pressure XPS Approach to in Situ Examination of Thin-Film Surfaces Exposed to Reactive Gases.

David Zanders, Engin Ciftyurek, Ersoy Subaşı

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Frequent Collaborators

6 joint publications

Anjana Devi

5 joint publications

Detlef Rogalla

4 joint publications

David Zanders

3 joint publications

Lukas Mai