Emma Verkama

1PUBLICATIONS
4CO-AUTHORS
Microfluidics and nanofluidics
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Publications (1)

|Mar 30, 2022
Conformality of atomic layer deposition in microchannels: impact of process parameters on the simulated thickness profile.

Jihong Yim, Emma Verkama, Jorge A Velasco

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Frequent Collaborators

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Jihong Yim

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Jorge A Velasco

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Karsten Arts

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Riikka L Puurunen