Karsten Arts
3PUBLICATIONS
6CO-AUTHORS
Get your video featured.
Publish with JoVEGet your video featured.
Publish with JoVE
Publications (3)
Sort by Publication Date:
|Mar 30, 2022
Conformality of atomic layer deposition in microchannels: impact of process parameters on the simulated thickness profile.Jihong Yim, Emma Verkama, Jorge A Velasco
|Jul 19, 2021
Impact of Ions on Film Conformality and Crystallinity during Plasma-Assisted Atomic Layer Deposition of TiO2.Karsten Arts, Harvey Thepass, Marcel A Verheijen
|Jun 04, 2021
Oxygen Recombination Probability Data for Plasma-Assisted Atomic Layer Deposition of SiO2 and TiO2.Karsten Arts, Sanne Deijkers, Riikka L Puurunen
Pageof 1
