Xiao Deng
3PUBLICATIONS
7CO-AUTHORS
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Publications (3)
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|Jun 23, 2025
Metal-free high-contrast wafer-level step height standards with large height-range based on all-dielectric multilayers.Jinming Gou, Yuying Xie, Xiao Deng
|Jan 18, 2021
Hybrid application of laser-focused atomic deposition and extreme ultraviolet interference lithography methods for manufacturing of self-traceable nanogratings.Jie Liu, Jun Zhao, Xiao Deng
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