Inho Seong

14PUBLICATIONS
7CO-AUTHORS
Catalysis and mechanisms of reactionsColloid and surface chemistryChemical and thermal processes in energy and combustionPlasma physics; fusion plasmas; electrical dischargesEngineering electromagnetics
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Publications (14)

|Sep 09, 2023
Enhancement of Ar Ion Flux on the Substrate by Heterogeneous Charge Transfer Collision of Ar Atom with He Ion in an Inductively Coupled Ar/He Plasma.

Inho Seong, Sijun Kim, Minsu Choi

|Aug 26, 2023
Characterization of SiO2 Plasma Etching with Perfluorocarbon (C4F8 and C6F6) and Hydrofluorocarbon (CHF3 and C4H2F6) Precursors for the Greenhouse Gas Emissions Reduction.

Minsu Choi, Youngseok Lee, Yebin You

|May 27, 2023
Contribution of Ion Energy and Flux on High-Aspect Ratio SiO2 Etching Characteristics in a Dual-Frequency Capacitively Coupled Ar/C4F8 Plasma: Individual Ion Energy and Flux Controlled.

Wonnyoung Jeong, Sijun Kim, Youngseok Lee

|Apr 28, 2023
On the Quenching of Electron Temperature in Inductively Coupled Plasma.

Inho Seong, Si-Jun Kim, Youngseok Lee

|Apr 13, 2023
Determination of Plasma Potential Using an Emissive Probe with Floating Potential Method.

Chulhee Cho, Sijun Kim, Youngseok Lee

|Mar 11, 2023
Development of the Tele-Measurement of Plasma Uniformity via Surface Wave Information (TUSI) Probe for Non-Invasive In-Situ Monitoring of Electron Density Uniformity in Plasma Display Fabrication Process.

Si-Jun Kim, Min-Su Choi, Sang-Ho Lee

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Frequent Collaborators

14 joint publications

Youngseok Lee

14 joint publications

Chulhee Cho

10 joint publications

Sijun Kim

9 joint publications

Shinjae You