Charles Winter
5PUBLICATIONS
13CO-AUTHORS
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Publications (5)
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|Feb 24, 2025
Vapor-Deposited MOF for Low-k Dielectric Seamless High-Aspect-Ratio Interconnect Gap Fill.Dipayan Pal, Naeun Yang, Harsono Simka
|Nov 18, 2023
Low-k SiO/AlO Nanolaminate Dielectric on Dielectric Achieved by Hybrid Pulsed Chemical Vapor Deposition.James Huang, Jing Mu, Yunil Cho
|Aug 02, 2023
Thermal atomic layer deposition of Er2O3 films from a volatile, thermally stable enaminolate precursor.Navoda Jayakodiarachchi, Rui Liu, Chamod D Dharmadasa
|Dec 03, 2021
Thermal atomic layer deposition of rhenium nitride and rhenium metal thin films using methyltrioxorhenium.Stefan Cwik, Keenan N Woods, S Sameera Perera
|Apr 10, 2018
Low Temperature, Selective Atomic Layer Deposition of Nickel Metal Thin Films.Marissa M Kerrigan, Joseph P Klesko, Kyle J Blakeney
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Frequent Collaborators
2 joint publications
Andrew Kummel
1 joint publications
Joseph P Klesko
1 joint publications
Kyle J Blakeney
1 joint publications
Rui Liu
1 joint publications
Xiaobing Hu
1 joint publications
Paul G Evans
1 joint publications
Kesong Wang
1 joint publications
Jing Mu
1 joint publications
James Huang
1 joint publications
Yunil Cho
