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Yunil Cho

3PUBLICATIONS

6CO-AUTHORS

Molecular and organic electronicsElemental semiconductorsSolar system planetary science (excl. planetary geology)

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Publications (3)

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|Nov 18, 2023

Low-<i>k</i> SiO<sub></sub>/AlO<sub></sub> Nanolaminate Dielectric on Dielectric Achieved by Hybrid Pulsed Chemical Vapor Deposition.

James Huang, Jing Mu, Yunil Cho

|May 19, 2023

Dielectric-on-Dielectric Achieved on SiO<sub>2</sub> in Preference to W by Water-free Chemical Vapor Depositions with Aniline Passivation.

James Huang, Yunil Cho, Victor Wang

|Mar 22, 2022

Selective Pulsed Chemical Vapor Deposition of Water-Free TiO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub> and HfO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub> Nanolaminates on Si and SiO<sub>2</sub> in Preference to SiCOH.

James Huang, Yunil Cho, Zichen Zhang

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Frequent Collaborators

3 joint publications

James Huang

3 joint publications

Zichen Zhang

3 joint publications

Kummel Andrew

2 joint publications

Victor Wang

1 joint publications

Charles Winter

1 joint publications

Chanyoung Kim

Frequent Collaborators

3 joint publications

James Huang

3 joint publications

Zichen Zhang

3 joint publications

Kummel Andrew

2 joint publications

Victor Wang

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