James Huang
3PUBLICATIONS
6CO-AUTHORS
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Publications (3)
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|Nov 18, 2023
Low-k SiO/AlO Nanolaminate Dielectric on Dielectric Achieved by Hybrid Pulsed Chemical Vapor Deposition.James Huang, Jing Mu, Yunil Cho
|May 19, 2023
Dielectric-on-Dielectric Achieved on SiO2 in Preference to W by Water-free Chemical Vapor Depositions with Aniline Passivation.James Huang, Yunil Cho, Victor Wang
|Mar 22, 2022
Selective Pulsed Chemical Vapor Deposition of Water-Free TiO2/Al2O3 and HfO2/Al2O3 Nanolaminates on Si and SiO2 in Preference to SiCOH.James Huang, Yunil Cho, Zichen Zhang
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