Victor Wang
2PUBLICATIONS
6CO-AUTHORS
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Publications (2)
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|Nov 18, 2023
Low-k SiO/AlO Nanolaminate Dielectric on Dielectric Achieved by Hybrid Pulsed Chemical Vapor Deposition.James Huang, Jing Mu, Yunil Cho
|May 19, 2023
Dielectric-on-Dielectric Achieved on SiO2 in Preference to W by Water-free Chemical Vapor Depositions with Aniline Passivation.James Huang, Yunil Cho, Victor Wang
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