Xiangchao Zhang

6PUBLICATIONS
11CO-AUTHORS
Data communicationsFluid-structure interaction and aeroacousticsNonlinear optics and spectroscopySignal processingNanoscale characterisation
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Publications (6)

|Feb 27, 2026
High-Sensitivity Defect Inspection for Unpatterned Wafers via Integrating Dark-Field Scattering and Diffraction Phase Microscopy.

Xiangchao Zhang, Qianru Zheng, Di Li

|Feb 13, 2025
Design and Calibration of a Slit Light Source for Infrared Deflectometry.

Lu Ye, Xiangchao Zhang, Min Xu

|Nov 09, 2024
Precision Optical Metrology and Smart Sensing.

Xiangchao Zhang, Jian Wang, Yajun Wang

|Mar 13, 2024
Balancing the Efficiency and Sensitivity of Defect Inspection of Non-Patterned Wafers with TDI-Based Dark-Field Scattering Microscopy.

Fei Yu, Min Xu, Junhua Wang

|Dec 09, 2023
Flexible Measurement of High-Slope Micro-Nano Structures with Tilted Wave Digital Holographic Microscopy.

Xinyang Ma, Rui Xiong, Wei Wang

|Feb 10, 2021
Traceable Reference Full Metrology Chain for Innovative Aspheric and Freeform Optical Surfaces Accurate at the Nanometer Level.

Yassir Arezki, Rong Su, Ville Heikkinen

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Frequent Collaborators

1 joint publications

Rong Su

1 joint publications

Charyar Mehdi-Souzani

1 joint publications

Yohan Kondo

1 joint publications

Nabil Anwer