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Shiyuan Liu

1PUBLICATIONS
1CO-AUTHORS
Nanophotonics
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Publications (1)

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|Aug 03, 2018
Development of a tomographic Mueller-matrix scatterometer for nanostructure metrology.

Yinyin Tan, Chao Chen, Xiuguo Chen

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Frequent Collaborators

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Xiuguo Chen

Frequent Collaborators

1 joint publications

Xiuguo Chen

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