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Xiuguo Chen

1PUBLICATIONS

1CO-AUTHORS

Nanophotonics

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Publications (1)

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|Aug 03, 2018

Development of a tomographic Mueller-matrix scatterometer for nanostructure metrology.

Yinyin Tan, Chao Chen, Xiuguo Chen

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Shiyuan Liu

Frequent Collaborators

1 joint publications

Shiyuan Liu

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