Yasuhisa Sano
2PUBLICATIONS
8CO-AUTHORS
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Publications (2)
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|Jan 01, 2022
High-throughput deterministic plasma etching using array-type plasma generator system.Yasuhisa Sano, Ken Nishida, Ryohei Asada
|Jan 01, 2022
Optimal deformation procedure for hybrid adaptive x-ray mirror based on mechanical and piezo-driven bending system.Takato Inoue, Yuka Nishioka, Satoshi Matsuyama
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