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Yasuhisa Sano

2PUBLICATIONS

8CO-AUTHORS

Powder and particle technologyMicroelectromechanical systems (MEMS)

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Publications (2)

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|Jan 01, 2022

High-throughput deterministic plasma etching using array-type plasma generator system.

Yasuhisa Sano, Ken Nishida, Ryohei Asada

|Jan 01, 2022

Optimal deformation procedure for hybrid adaptive x-ray mirror based on mechanical and piezo-driven bending system.

Takato Inoue, Yuka Nishioka, Satoshi Matsuyama

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Frequent Collaborators

1 joint publications

Takato Inoue

1 joint publications

Hiroki Nakamori

1 joint publications

Xianbo Shi

1 joint publications

Lahsen Assoufid

1 joint publications

Tetsuya Ishikawa

1 joint publications

Daisetsu Toh

1 joint publications

Satoshi Matsuyama

1 joint publications

Kazuto Yamauchi

Frequent Collaborators

1 joint publications

Takato Inoue

1 joint publications

Hiroki Nakamori

1 joint publications

Xianbo Shi

1 joint publications

Lahsen Assoufid

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