Suyoung Yoo

1PUBLICATIONS
5CO-AUTHORS
Nanoscale characterisation
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Publications (1)

|Jun 12, 2026
Recent efforts of vapour-phase strategies for EUV resist toward high- and hyper-NA extreme ultraviolet lithography.

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Frequent Collaborators

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Thi Thu Huong Chu

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Nikhil Tiwale

1 joint publications

Myung Mo Sung

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Chang-Yong Nam