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Updated: Jun 29, 2026

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在CMOS后的处理挑战和CMOS-MEMS微热器的设计发展,用于本地CNT合成.

Avisek Roy1, Bao Q Ta1, Mehdi Azadmehr1

  • 1Department of Microsystems, University of South-Eastern Norway, 3184 Horten, Norway.

Microsystems & nanoengineering
|November 8, 2023
PubMed
概括

研究人员为CMOS微热器开发了一种后处理技术,使其能够与碳纳米管 (CNT) 直接集成. 这种方法允许通过热化学蒸汽沉积 (CVD) 进行局部CNT生长,用于先进的微型和纳米技术应用.

关键词:
碳纳米管和富勒的使用其他纳米技术

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相关概念视频

MOS Capacitor01:25

MOS Capacitor

A Metal-Oxide-Semiconductor (MOS) capacitor is a fundamental structure used extensively in semiconductor device technology, particularly in the fabrication of integrated circuits and MOSFETs (metal-oxide-semiconductor field-effect transistors). The MOS capacitor consists of three layers: a metal gate, a dielectric oxide, and a semiconductor substrate.
The metal gate is typically made from highly conductive materials such as aluminum or polysilicon. Beneath the metal gate lies a thin layer of...