交互式错误分析和尺度因子非线性减小方法用于Lissajous频率调制MEMS陀螺仪
Rui Li1,2, Xiaoxu Wang2, Kaichen Yan2
1Institute of Flexible Electronics, Northwestern Polytechnical University, 127 West Youyi Road, Beilin District, Xi'an 710072, China.
本研究涉及使用Lissajous频率调制的MEMS陀螺仪的尺度因子非线性. 错误补偿技术显著降低了非线性,提高了MEMS陀螺仪应用的准确性.
科学领域:
- * MEMS 陀螺镜可以使用
- * 控制系统工程 * 控制系统工程
- * * 信号处理 信号处理
背景情况:
- *光频调制 (LFM) 模式提高了MEMS陀螺仪的稳定性.
- *尺度因子 (SF) 的非线性限制了LFM MEMS陀螺仪的全尺度精度.
- * 合,相延迟和振幅不匹配的相互作用效应有助于SF非线性.
研究的目的:
- * 调查导致LFM MEMS陀螺仪SF非线性的主要因素.
- * 开发和验证错误补偿方法,以减少SF非线性.
- *为了提高MEMS陀螺仪的准确性,进行精确的测量.
主要方法:
- *分析了刚性合,系统相延迟,读出调节移相和速度幅度不匹配之间的相互作用效应.
- * 实现了频率差控制和调节阶段匹配.
- * 采用瞬间频率差异观察和正方位电压的抑制硬度合.
- *通过观察振幅控制力和调整相锁循环 (PLLs) 参考来补偿系统相位错误.
主要成果:
- * 确定了剩余刚性合和剩余系统相位误差作为SF非线性的主要驱动因素.
- *通过模拟,在±500°/s测量范围内实现了97%的SF非线性降低.
- * 证明足够大的频率分割有效地限制了SF非线性.
结论:
- * 刚性合和系统相位误差是LFM MEMS陀螺仪SF非线性的主要原因.
- * 建议的错误补偿策略有效地减轻了SF非线性,显著提高了陀螺仪的精度.
- * 保持适当的频率分割对于限制MEMS陀螺仪的SF非线性至关重要.
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