双向静电MEMS调节的VCSELs是双向的
Optics letters
|February 15, 2024
概括
双向MEMS VCSEL提供更快,更线性波长调整. 这一突破使用静态电压来放大调,达到54.5nm范围在2.73MHz.
科学领域:
- 光电学是指光电子产品.
- 光子学是指光子学的使用方法.
- 在MEMS技术方面,
背景情况:
- 微电子机械系统 (MEMS) 垂直腔表面发射激光器 (VCSEL) 已知具有快速,连贯的波长调整.
- 在MEMS VCSEL中标准的静电驱动具有非线性,并且需要高电压 (>100 V) 来实现MHz扫描速率.
研究的目的:
- 呈现一个双向MEMS VCSEL设计.
- 使用静态电压实现基本的线性和放大波长调.
- 为了展示高速调能力.
主要方法:
- 使用了双向MEMS VCSEL架构.
- 采用了InP/SOI MEMS债券结构.使用了InP/SOI MEMS债券结构.
- 应用静态电压以增强调线性和范围.
主要成果:
- 实现了54.5纳米波长调范围,受益限制.
- 调集中在1586nm左右.
- 在2.73MHz的启动频率上经过证明的操作.
结论:
- 双向MEMS VCSEL有效地解决了标准静电驱动的局限性.
- 静态电压的应用使线性和放大波长调整成为可能.
- 这项技术促进了高速,宽范围可调节激光器.
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