概括
这项研究引入了一种新型电路,用于线性化微光电机系统 (MOEMS) 加速度计,提高高灵敏度应用的精度. 新设计增强了加速检测分辨率和范围,使汽车和军事等行业受益.
科学领域:
- 微光电机械系统 (MOEMS) 是一种微光电机械系统.
- 传感器信号的调节条件
- 在MEMS加速度计中,加速度计是MEMS.
背景情况:
- 微网格加速度计显示与加速度相对非线性正弦/正弦输出.
- 现有的线性化方法可能会与相位,大小和偏移误差作斗争.
- 高精度的加速检测对于先进的应用至关重要.
研究的目的:
- 为三轴MOEMS加速度计提出一种新的线性化信号调节电路.
- 为了在整个加速范围实现线性数字输出.
- 为了提高加速检测的分辨率和精度.
主要方法:
- 利用一个分区插值技术来处理非线性强度变化.
- 包含90度相位移电路和高精度直流偏向电压电路.
- 从相位,大小和正弦-正弦信号的偏移中最大限度地减少错误.
主要成果:
- 实现了三轴微电网MOEMS加速度计的微毫克分辨率.
- 证明过低的横轴误差:3.57% (x轴),1.22% (y轴),0.89% (z轴) 的时间.
- 报告的偏差不稳定性<26μg和速度随机步行<38.7μg/√Hz.
结论:
- 拟议的电路有效地使MOEMS加速度计输出线性化.
- 增强的加速度计提供高灵敏度和大操作范围.
- 汽车和军事装备应用的巨大潜力.
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