基于迈克尔森干扰仪的电子斑点干扰测量的角度测量方法

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Updated: Jun 16, 2025

Implementation of a Reference Interferometer for Nanodetection
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Implementation of a Reference Interferometer for Nanodetection

Published on: April 26, 2014

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Siyuan Zhu, Tao Li, Zhongshan Chen

    Optics express
    |June 14, 2025
    PubMed
    概括

    这项研究引入了一种新的小角度测量设置,结合几何和电子斑点模式干扰测量 (ESPI) 方法. 集成系统提高了准确性和稳定性,用于各种应用中的精确角度测量.

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