MEMS

Dorra Nasr1,2, Marco Baù1, Alessandro Nastro1

  • 1Department of Information Engineering, University of Brescia, 25123 Brescia, Italy.

PubMed
概括

本研究引入了一种微电子机械系统 (MEMS) 可变抗拒感应传感器,用于非接触式检测旋转的铁磁目标. 该MEMS传感器可靠地测量旋转速度,近距离和形状,展示了用于紧型运动传感应用的潜力.

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