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Updated: Jul 17, 2026

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在动态随机访问内存制造中,用于振动活性区域效应的3D重建和蚀刻配置模拟

Ziyi Hu1,2, Jing Wen1, Chaoran Yang1,2,3

  • 1State Key Laboratory of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China.

Communications engineering
|March 1, 2026
PubMed
概括

研究人员调查了动态随机存储器 (DRAM) 制造中的"动活跃区域" (AA) 缺陷. 在等离子蚀刻过程中优化氧气流量显著改善了AA结构完整性和DRAM设备可靠性.

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相关概念视频

Understanding Memory01:19

Understanding Memory

Memory is the retention of information or experiences over time, facilitated through three main processes: encoding, storage, and retrieval. Encoding is the process of inputting information into the memory system. For instance, when listening to a lecture, watching a play, reading a book, or having a conversation, the brain is actively encoding information. This initial stage involves transforming sensory input into a form that can be processed and stored by the brain. Various factors, such as...