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Updated: Jul 28, 2026
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Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
Interferometer-controlled scanning transmission X-ray microscopes at the Advanced Light Source
A L D Kilcoyne1, T Tyliszczak, W F Steele
1Department of Physics, North Carolina State University, Raleigh, NC 27895, USA.
Journal of Synchrotron Radiation
|February 28, 2003
Summary
Two new soft X-ray scanning transmission microscopes were developed at the Advanced Light Source (ALS), achieving 30 nm resolution. These advanced microscopes offer precise imaging capabilities for scientific research.
Area of Science:
- X-ray microscopy
- Advanced Light Source (ALS)
- Nanotechnology
Background:
- Soft X-ray scanning transmission microscopy is crucial for nanoscale imaging.
- Existing technologies faced limitations in precision and stability.
Purpose of the Study:
- To design, build, and commission two new soft X-ray scanning transmission microscopes.
- To enhance imaging precision and stability using advanced control systems.
Main Methods:
- Implementation of interferometer control for precise zone plate positioning.
- Development of digital and custom feedback control systems.
- Utilizing undulator and bending-magnet beamlines for illumination.
Main Results:
- Achieved long-term positional stability and compensation for transverse displacement.
- Enabled low-distortion orthogonal X, Y imaging.
- Resolved periodic features with 30 nm half period using a 40 nm outermost zone width zone plate.
- Demonstrated high count rates (tens of MHz and >3 MHz) with high energy and spatial resolution.
Conclusions:
- The new soft X-ray microscopes offer significant advancements in nanoscale imaging.
- The developed control systems and beamline integration provide high-performance imaging capabilities.
- These instruments are poised to advance research in various scientific fields requiring high-resolution X-ray microscopy.
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