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The effect of ion energy upon plasma polymerization deposition rate for acrylic acid
David Barton1, Robert D Short, Stuart Fraser
1Dept. of Engineering Materials, University of Sheffield, Sir Robert Hadfield Building, Mappin St, Sheffield, UK S1 3JD.
Chemical Communications (Cambridge, England)
|March 5, 2003
Abstract:
A novel technique, which allows the importance of ion energy in plasma polymer film growth to be investigated, without perturbation of any other plasma parameter (particle densities or temperatures) or, in principle, perturbation of particle (neutral or ion) fluxes is applied in the plasma polymerisation of acrylic acid and new insight into polymer formation is gleaned.