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Quantitative Hardness Measurement by Instrumented AFM-indentation
Published on: November 22, 2016
Mechanical characterization of micro/nanoscale structures for MEMS/NEMS applications using nanoindentation techniques
Xiaodong Li1, Bharat Bhushan, Kazuki Takashima
1Nanotribology Laboratory for Information Storage and MEMS/NEMS, Department of Mechanical Engineering, The Ohio State University, 206 West 18th Avenue, Columbus, OH 43210-1107, USA.
Ultramicroscopy
|June 13, 2003
Summary
Mechanical properties of micro/nanoscale structures like silicon carbide were characterized using nanoindentation and bending tests. These methods effectively evaluate materials for micro/nanoelectromechanical systems (MEMS/NEMS) design.
Area of Science:
- Materials Science
- Mechanical Engineering
- Nanotechnology
Background:
- Reliable design of micro/nanoelectromechanical systems (MEMS/NEMS) requires understanding the mechanical properties of constituent micro/nanoscale structures.
- Characterization of various materials at this scale is crucial for advancing MEMS/NEMS technology.
Purpose of the Study:
- To perform micro/nanomechanical characterization of undoped single-crystal silicon, polysilicon, SiO(2), SiC, Ni-P, and Au.
- To evaluate the suitability of nanoindentation, microscratching, and bending tests for assessing micro/nanoscale material properties.
Main Methods:
- Nanoindentation and microscratching were employed to measure hardness, elastic modulus, and scratch resistance.
- Vickers indentation was used for fracture toughness assessment.
- Depth-sensing nanoindentation was utilized for bending tests on nanoscale silicon and microscale Ni-P and Au beams.
Main Results:
- Silicon carbide (SiC) films demonstrated superior hardness, elastic modulus, and scratch resistance compared to other tested materials.
- Nanoscale silicon beams exhibited brittle fracture, while Ni-P beams showed linear-elastic followed by abrupt failure, and Au beams displayed elastic-plastic behavior.
- Finite element method (FEM) simulations accurately predicted stress distributions in the tested beams.
Conclusions:
- The employed nanoindentation, scratch, and bending tests are effective for evaluating the mechanical properties of micro/nanoscale structures.
- These characterization techniques provide valuable data for the reliable design and fabrication of MEMS/NEMS devices.
