Related Experiment Video

Updated: Sep 23, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
10:25

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

Published on: September 14, 2018

Towards sub-0.5 A electron beams

O L Krivanek1, P D Nellist, N Dellby

  • 1Nion Co., 1102 8th St, Kirkland, WA 98033, USA. krivanek@nion.com

Ultramicroscopy
|July 23, 2003
PubMed

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