Bernd Nöhammer1, Christian David, Jens Gobrecht
1Laboratory for Micro- and Nanotechnology, Paul Scherrer Institut, CH-5232 Villigen, Switzerland. bernd.noehammer@psi.ch
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We optimized staircase grating profiles for absorbing materials. Our findings reveal distinct profiles for materials with and without significant absorption, crucial for soft-x-ray and extreme-ultraviolet optics.
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